Loading...
accuracy and precision of our Wavefront Sensors
Exceptional accuracy and precision of our Wavefront Sensors
Independent comparison of SpotOptics Shack-Hartmann wavefront sensors with industry-standard interferometers including Zygo and Veeco systems.
Veeco results vs Optino results contour of wavefront
SpotOptics Shack-Hartmann wavefront sensors’ results have been compared with results from the most popular interferometers: Zygo, Veeco, Fisba, and 4D Technology.
SpotOptics Optino vs. Zygo Interferometer
- A small area (7 mm) of a hard-disk platter was tested using the Zygo GPIxp HR (high resolution) interferometer.
- The same area was tested with our standard instrument Optino/SenSoft.
- A high-quality lambda/20 flat mirror was used for the calibration.
- Both tests were done in double pass at 632.8 nm.
Measured parameters
| Parameter | Zygo GPIxp HR | Optino Pro | Difference |
|---|---|---|---|
| P-V (nm) | 93.2 | 100.2 | 7 |
| RMS (nm) | 18.3 | 20.3 | 2 |
| Defocus (nm) | -23.2 | -19.9 | -3.3 |
| P-V (waves) | 0.1473 | 0.1596 | 0.011 |
3D surface plot from Zygo
3D surface plot from Optino
SpotOptics Optino vs. Veeco Interferometer
- A small area (9 mm) of a flat mirror was tested using a high-resolution Veeco interferometer.
- The same area was tested with our standard instrument Optino/SenSoft mounting a cooled CCD camera.
- Both tests were done at 632.8 nm.
Contour of wavefront from Veeco
Contour of wavefront from
Veeco: PV 10nm, RMS 1nm|Optino: PV 14nm, RMS 2.1nm
The wavefront from Veeco (left) and the wavefront as measured by SenSoft (right) show a clear correspondence between the two measurement techniques.
